A wafer inspection system positions wafers with impressive µ-precision with its ultra-flat rotary axis as well as in the X and Y directions. Mounted on a granite base, our linear guides, linear motors and a rotary table create a positioning unit that enables simultaneous inspection of silicon wafers from above and below with minimum height and maximum hollow shaft. The system represents our ability to combine our own individual components into customised high-precision systems.
We provide a large number of sophisticated standardised systems which, thanks to their modular design, can be customised precisely to fit the needs of any application within a very short time. This reduces the often lengthy development time to a minimum and allows for rapid application of functioning systems, all from a single source.

For demanding positioning tasks – from the component to a ready-to-connect system.